Фотолитографическая машина Macex/литографическая для выравнивания масок/экспозиционный аппарат с подложкой фосфида
- Категория: >>>
- Поставщик: Shenzhen,Macex,Industry,Co.,Ltd.
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Описание и отзывы
Трекер стоимости
| Месяц | Минимальная цена | Макс. стоимость |
|---|---|---|
| Sep-19-2025 | 0.15 $* | 0.20 $* |
| Aug-19-2025 | 0.77 $* | 0.58 $* |
| Jul-19-2025 | 0.12 $* | 0.36 $* |
| Jun-19-2025 | 0.71 $* | 0.25 $* |
| May-19-2025 | 0.93 $* | 0.99 $* |
| Apr-19-2025 | 0.39 $* | 0.13 $* |
| Mar-19-2025 | 0.39 $* | 0.51 $* |
| Feb-19-2025 | 0.3 $* | 0.2 $* |
| Jan-19-2025 | 0.67 $* | 0.48 $* |
Характеристики
Product Description
Lithography Machine Mask Aligner photo-etching machine
The exposure light source adopts imported UV and light source shaping module, with
small heat and good light source stability
The inverted lighting structure has good heat dissipation effect and light source close effect,
and maintenance are simple and convenient
Equipped with high magnification binocular dual field microscope and 21 inch wide screen LCD, it can be visually aligned through
eyepiece or CCD + display, with high alignment accuracy, intuitive process and convenient operation
small heat and good light source stability
The inverted lighting structure has good heat dissipation effect and light source close effect,
and maintenance are simple and convenient
Equipped with high magnification binocular dual field microscope and 21 inch wide screen LCD, it can be visually aligned through
eyepiece or CCD + display, with high alignment accuracy, intuitive process and convenient operation
Specification
Model | Macex-G25A | Macex-G25D | Macex-G31 | Macex-G33 | |
Exposure type | One side | One side | Double side alignment and double side exposure | ||
Exposure head NO. | 1 Exposure head | 1 Exposure head | 2 Exposure head | 2 Exposure head | |
Cooling method | Air cooling | Air cooling | Air cooling | Air cooling | |
Type of light source | Mercury lamp source | Ultraviolet light source | Mercury lamp source | Ultraviolet light source | |
Exposure area | ≤∅100mm | Φ100mm | ≤∅120mm | ≥∅115mm | |
Exposure mode | Contact exposure | micro-force paralleling technology | micro-force paralleling technology | micro-force paralleling technology | |
Light source | mercury | mercury | UV-LED | UV-LED | |
Exposure unevenness | ∅100mm<±4% | ≤±3% | ∅100mm≤±6% | ≤±3%Exposureintensity≥20mw/cm2 (365nm,404nm,435nmCombined UV） | |
Substrate thickness | 1-5mm | ≤5 mm | 0.1-1mm | ≤5 mm | |
Exposure resolution | 3μm | 1 μm | 1 μm | 1 μm | |
Alignment accuracy | ±0.5μm | 1 μm | Positive：1 μm / On the other side:3-5μm | 1 μm | |
Lighting range | ∅115mm | ∅117mm | ∅120mm | Front and back ≥ ∅115mm | |
Camera system | Binocular separation system | dual-field CCD system | dual-field CCD system | dual-field CCD system | |
Microscope system | 50-375 continuous zoom | 91x ~ 570X continuous zoom (objective lens 1.6x ~ 10x continuous zoom), the adjustable range of double objective lens distance is 50mm ~ 120mm | 0.7-4.5 continuous zoom | 60x, 120x continuous zoom (objective magnification 2x, 4x two), double objective adjustable distance 25mm-70mm | |
Characteristic
——High uniformity fly-eye exposure head / air flotation leveling mechanism / reliable vacuum clamping exposure.
——Above feature make sure the high resolution and high uniformity.
——Aligning method by mask keep stable and substrate feeding, which make sure the consistency of the guide gravity and the force.
——Using gapless straight guide, high precision, fast speed.
——Above feature make sure the high resolution and high uniformity.
——Aligning method by mask keep stable and substrate feeding, which make sure the consistency of the guide gravity and the force.
——Using gapless straight guide, high precision, fast speed.
The work piece stage is a key part of the lithography machine, which is composed of the mask sample overall motion stage (XY), the mask sample relative
motion stage (XY), the rotation stage, the sample leveling mechanism, the sample focusing mechanism, the wafer stage, the mask clamp and the pull-out mask stage.
The sample leveling mechanism comprises a ball seat and a hemisphere. In the leveling process, firstly, pressure air is applied to the ball seat and hemisphere,
and then the ball seat, hemisphere and sample piece move upward through the focusing hand wheel, so that the sample piece can be leveled against the mask,
and then the two position three-way solenoid valve switches the ball seat and hemisphere to vacuum for locking to maintain the leveling state.
motion stage (XY), the rotation stage, the sample leveling mechanism, the sample focusing mechanism, the wafer stage, the mask clamp and the pull-out mask stage.
The sample leveling mechanism comprises a ball seat and a hemisphere. In the leveling process, firstly, pressure air is applied to the ball seat and hemisphere,
and then the ball seat, hemisphere and sample piece move upward through the focusing hand wheel, so that the sample piece can be leveled against the mask,
and then the two position three-way solenoid valve switches the ball seat and hemisphere to vacuum for locking to maintain the leveling state.
FAQ
1. who are we?
We are based in Guangdong, China, start from 2021,sell to North America(20.00%),South America(20.00%),Eastern Europe(20.00%),Western Europe(20.00%),Southeast Asia(15.00%),South Asia(3.00%),Africa(2.00%). There are total about 1-4 people in our office.
2. how can we guarantee quality?
Always a pre-production sample before mass production;
Always final Inspection before shipment;
3.what can you buy from us?
battery tester,battery welder,battery aging machine,soldering robot,screw driving robot
4. why should you buy from us not from other suppliers?
Macex, combined from Machine expert also Machine export, Shenzhen Macex Industry Co.,ltd, started in industrial field since 2000, developed with high speed developing of china.
5. what services can we provide?
Accepted Delivery Terms: FOB,CFR,EXW,CPT,DDP；
Accepted Payment Currency:USD,EUR,CAD;
Accepted Payment Type: T/T,Credit Card,PayPal,Western Union;
Language Spoken:English,Chinese
We are based in Guangdong, China, start from 2021,sell to North America(20.00%),South America(20.00%),Eastern Europe(20.00%),Western Europe(20.00%),Southeast Asia(15.00%),South Asia(3.00%),Africa(2.00%). There are total about 1-4 people in our office.
2. how can we guarantee quality?
Always a pre-production sample before mass production;
Always final Inspection before shipment;
3.what can you buy from us?
battery tester,battery welder,battery aging machine,soldering robot,screw driving robot
4. why should you buy from us not from other suppliers?
Macex, combined from Machine expert also Machine export, Shenzhen Macex Industry Co.,ltd, started in industrial field since 2000, developed with high speed developing of china.
5. what services can we provide?
Accepted Delivery Terms: FOB,CFR,EXW,CPT,DDP；
Accepted Payment Currency:USD,EUR,CAD;
Accepted Payment Type: T/T,Credit Card,PayPal,Western Union;
Language Spoken:English,Chinese
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