Высококачественная плазменная Улучшенная химическая Трубчатая Печь PECVD для наносинтеза углерода


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Трекер стоимости

Месяц Минимальная цена Макс. стоимость
Sep-17-2025 0.81 $* 0.15 $*
Aug-17-2025 0.65 $* 0.72 $*
Jul-17-2025 0.92 $* 0.0 $*
Jun-17-2025 0.48 $* 0.10 $*
May-17-2025 0.97 $* 0.85 $*
Apr-17-2025 0.67 $* 0.23 $*
Mar-17-2025 0.38 $* 0.38 $*
Feb-17-2025 0.13 $* 0.77 $*
Jan-17-2025 0.64 $* 0.42 $*

Характеристики


High quality 1200C Plasma Enhanced Chemical Vapor Deposition PECVD tube furnace for Carbon nanosynthesis



Our Services


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Product Description


This equipment ionizes a gas containing a film-constituting atom by means of radio frequency, etc., and forms a plasma locally. The plasma is chemically active and reacts easily, and a desired film is deposited on the substrate. In order to allow the chemical reaction to proceed at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD).



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Technology parameter


Product application


This equipment can deposit SiOx, SiNx, amorphous silicon, microcrystalline silicon, nano-silicon, SiC, diamond-like and other films on the surface of sheet or similar shaped samples, and can deposit p-type, n-type doping Miscellaneous film. The deposited film has good uniformity, compactness, adhesion, and insulation. Widely used in cutting tools, high-precision molds, hard coatings, high-end decoration and other fields.


 


The detail specifications of high temperature lab electric furnace


 





































































PECVD Technical Parameters



 


 


 


 


 


 


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Max.temperature:



1200C



Working temperature:



≤1100C



Tube material:



Quartz tube



Tube size:



Diameter:60mm,heating zone length:200mm



Voltage:



220V/50HZ/6KW



Heating element:



Resistance wire



Thermocouple:



K type



Temperature accuracy:



±1℃



Heating rate:



10℃/min



Temperature control:



PID control and self-tuning adjustment, intelligent 30-segment programmable control, with over-temperature and break-off alarm function



 


 


 


 


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Proton flowmeter



1. Three-way gas flow system


2. Internally equipped with high-precision digital display mass flow meter for accurate control of gas flow


 


3. Gas flow range is 0-500SCCm with an error of 0.02%


 


4.Outlet vacuum pressure gauge, built-in gas mixing system,


 


5. Stainless steel needle valve meter, standard double ferrule joint



 


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Plasma RF power supply



Output power: 5-500W ±1°C


RF frequency: 13.56MHz ±0.005%


Reflected power: up to 100W


Match: Automatic


RF interface: 50Ω, N-type


Cooling: air cooling


power supply:AC 208-240V,50/60HZ



 


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Vacuum system



Brand: ShuangTa


High vacuum molecular pump set: Diffusion pump unit


Vacuum degree up to: 10-1Pa--10-3Pa


KF25 quick connect, stainless steel bellows, manual flapper valve and flange, vacuum pump



Warranty



One-year warranty period, lifetime maintenance, (excluding related consumables, such as furnace tubes, seals, etc.)



 


 





Related products




Certifications


Our products have passed CE certification, SGS,UL,ISO9001 and other certificates.


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Company Information


Nanyang Xinyu New Material Technology Co., Ltd is a professional Heat treatment furnace manufacture which with more than 15 years experiences.


We have Professional technical engineers team, complete scientific management system, standard workshop and strict quality-monitoring framework.


 


The most important thing is that we have our own furnace shell processing factory, which has a great advantage for delivery time and price.


 


Our furnaces have been exported to more than 30 countries and with good feedback from our customers.


Our quality policy is "first-class Quality, first-class technology and sincere service to make customers satisfy".Our eternal faith is "living on quality, reputation on honesty, development on mutual benefit". We are looking forward to offering our best services to our friends from at home and abroad.


 


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  Car bottom furnace



  High vacuum furnace



  Tube furnace



  Muffle furnace



  Atmosphere furnace



  Crucible furnace



  Bottom loading furnace



  Dental sintering furnace



  Etc.



 


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How to make an order


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FAQ


 


1. Q:Are you muffle furnace manufacturer?                                                                                         


    A: Yes, we are professional muffle furnace manufacturer of China.


 


2. Q:What kind terms of payment can be accepted?


    A: L/C, T/T, Western Union, Paypal, Trade Assurance, etc.


 


3. Q: Can I ask for customized furnace?


    A: Yes, customized furnace is accepted.


 


4. Q: What about the delivery time?


    A: Normally within 15 days after receiving your payment or based on order quantity and production schedule.


 


5. Q: What about the guarantee period?


    A: The guarantee period is 12 months.


 


6. Q: What about the Minimum Order Quantity?


    A: The MOQ is 1 pcs


High quality 1200C Plasma Enhanced Chemical Vapor Deposition PECVD tube furnace for Carbon nanosynthesis


High quality 1200C Plasma Enhanced Chemical Vapor Deposition PECVD tube furnace for Carbon nanosynthesis


High quality 1200C Plasma Enhanced Chemical Vapor Deposition PECVD tube furnace for Carbon nanosynthesis




Данные ресурс не является интернет-магазином, а лишь содержит ссылки на международную торговую площадку Alibaba.com